Cleanroom Restart Procedures after Worst-Case Events
Abstract:Cleanroom Restart Procedures after Worst-Case Events
Unexpected things happen everywhere. Cleanrooms are no exceptions for such. Worst-case events like bad weather conditions, power outage, airflow suspension, or serious excursions during environmental monitoring (EM) can occur. They are unavoidable and might require a temporary major or minor shutdown of the cleanroom.
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